The meeting took place at RSS office in the national capital. BJP president Rajnath Singh too attended the meeting.
Mr Modi, who was campaigning in Uttar Pradesh, landed in Delhi after electioneering in the nine-phased polls drew to a close and went straight to meet former Prime Minister Atal Bihari Vajpayee.
"After addressing final campaign rally came to seek Atalji's blessings. Had met him when campaign started. Its always special to meet him," the Gujarat Chief Minister tweeted.
Thereafter, he met party president Rajnath Singh at his residence.
After the meeting with Mr Singh, Mr Modi went to RSS office in Jandewalan to meet the Sangh chief and other senior leaders, including Suresh Soni.
Sources said the meeting with RSS leaders was to review the campaign and chalk out future steps.
The last phase of polling will take place on Monday, including in Varanasi where Mr Modi is contesting.